Boedeker Plastics, Inc. Logo -- boedeker plastics supply shiner
   texas tx usa boedeker plastics material supply shiner texas usa plastics
   distributor plastics sales plastics supply plastics machine shop

Semitron® CMP LL5 and Semitron® CMP XL20
Next-Generation CMP Ring Material Specifications

904 West 6th Street, Shiner, Texas 77984 USA
Phone: 1-361-594-2941     Fax: 1-361-594-2349     E-Mail: info@boedeker.com

1-800-444-3485

BPI Home Page | Applications | Materials Guide | Contact Us!
Semitron Family Overview | Semitron ESd 225 | Semitron ESd 410C | Semitron ESd 420
Semitron ESd 480 | Semitron ESd 490HR | Semitron ESd 500HR | Semitron ESd 520HR
Semitron MDS 100 | Semitron MP 370 | Semitron CMP LL5 | Semitron CMP XL25 | Semitron MPR 1000

blue line

click to resize photo
BACKGROUND

The chemical mechanical planarization (CMP) process plays a critical role in the manufacture of today's advanced semiconductor "chips." It is a highly accurate polishing process that flattens and smoothes the surface of a silicon wafer, creating a highly uniform surface upon which multiple layers of intricate chip circuitry are built. This results in high-performance chips that are driving today's most advanced electronics. As new generations of chips become increasingly smaller -- below 0.35 micron -- CMP becomes more essential in maintaining a wafer's integrity. Benefits to the chipmakers include higher performance and more reliable chips at a lower cost of ownership.

click to resize photo
GENERAL DESCRIPTION

Boedeker Plastics is proud to introduce the latest members of Quadrant Engineering Plastic Products' family of high performance materials for use in the semiconductor processing equipment industry.

Semitron CMP LL5 and Semitron CMP XL20 materials are now available for fabrication into CMP rings and other machined parts. Both materials offer significant extended life capabilities over standard PolyPhenylene Sulfide products.

( see also Techtron PPS Specifications )


SEMITRON ® CMP GRADES

Semitron ® CMP LL5
Specially developed from enhanced polyester-based resin, Semitron CMP LL5 features wear life in excess of 5 times over standard PPS when used in Oxide chemistries. This longer wear life translates into lower costs for all CMP chemistries, and is ideal for use in designs that utilize steel or ceramic ring reinforcement.

This material is available in custom-sized tube form and is  WHITE  in color.

Semitron ® CMP XL20
Semitron CMP XL20 was developed from a proprietary polyamide-base resin and offers wear life more than 20 times that of standard PPS in all CMP chemistry environments. This material has the best combination of wear life and mechanical strength and stiffness ... ideal for the most demanding applications and in extreme process environments.

This material is available in custom-sized tube form and is  GREY  in color.

KEY PROPERTIES

• Good for both wet and dry environments • High strength and rigidity • Excellent stain resistance • Good wear resistance • Excellent dimensional stability

Semitron CMP LL5 and XL20 Wear Rate & Cost Comparison

blue line


TYPICAL PROPERTIES of SEMITRON CMP MATERIALS

ASTM or UL test Property Semitron ®
CMP LL5
Semitron ®
CMP XL20
PHYSICAL
D792 Density (lb/in³)
(g/cm³)
0.052
1.44
0.051
1.41
D570 Water Absorption, 24 hrs (%) 0.06 0.4
D570 Water Absorption, saturation (%) 0.47 1.7
MECHANICAL
D638 Tensile Strength (psi) 10,500 18,000
D638 Tensile Modulus (psi) 500,000 600,000
D638 Tensile Elongation at Break (%) 5 10
D790 Flexural Strength (psi) 14,000 24,000
D790 Flexural Modulus (psi) 360,000 600,000
D695 Compressive Strength (psi) 15,250 24,000
D695 Compressive Modulus (psi) 400,000 478,000
D732 Shear Strength (psi) 8,500 16,000
D785 Hardness, Rockwell M94 E80 / M120
D256 IZOD Notched Impact (ft-lb/in) 0.4 2.0
- Coefficient of Friction
Dynamic (dry vs. steel)
0.19 0.35
- Limiting PV (with 4:1 safety factor)
(ft-lb-in²-min)
6,000 12,500
- Wear Factor "k" x 10-10
in³-min/ft-lbs-hr
35 50
THERMAL
D696 Coefficient of Linear Thermal Expansion
(x 10-5 in./in./°F)
4.5 1.7
D648 Heat Deflection Temp (°F / °C)
at 264 psi

180 / 82

532 / 278
D3418 Tg Glass Transition Temperature (°F / °C) n.a. 527 / 275
D3418 Melting Temperature (°F / °C) 491 / 255 n.a.
- Max Operating Temp (°F / °C) 210 / 99 500 / 260
C177 Thermal Conductivity
(BTU-in/ft²-hr-°F)
(x 10-4 cal/cm-sec-°C)

1.9
6.6

1.8
6.3
UL94 Flammability Rating HB V-0
ELECTRICAL
D149 Dielectric Strength (V/mil) short time, 1/8" thick - 580
D150 Dielectric Constant at 1 MHz 3.6 4.2
D150 Dissipation Factor at 1 MHz 0.02 0.026
D257 Surface Resistivity (ohm/square)at 50% RH > 1013 > 1016
IONIC IMPURITIES (by total digestion)
ICP/MS Na (sodium), ppm 2.2 3.9
ICP/MS K (potassium), ppm 12 0.5
ICP/MS Fe (iron), ppm 8.2 1.5
OUTGASSING
E595 TML (total mass loss), % 0.15 1.85
E595 CVCM (collected volatile condensable material), % 0.00 0.00
E595 WVR (water vapor recovered), % 0.05 0.49

NOTE: The information contained herein are typical values intended for reference and comparison purposes only. They should NOT be used as a basis for design specifications or quality control. Contact us for manufacturers' complete material property datasheets.
All values at 73°F (23°C) unless otherwise noted.
SEMITRON is a registered trademark of Quadrant Engineering Plastic Products.

blue line

http://www.boedeker.com/semitron-cmp.htm

Boedeker Plastics, Inc.
904 West 6th Street, Shiner, Texas 77984 USA
USA TOLLFREE : 1-800-444-3485
Phone: 1-361-594-2941     Fax: 1-361-594-2349     E-Mail: info@boedeker.com

©     Copyright Boedeker Plastics, Inc.